| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical filter that has good reproductivity of spectral characteristics and also suppresses charging. <P>SOLUTION: An optical filter 1 has a transparent substrate 2, and a filter group 3 formed on the transparent substrate 2. The filter group 3 includes a plurality of first thin films 31 composed of a high refractive index material formed by IAD evaporation method, and a plurality of second thin films 32 composed of SiO<SB POS="POST">2</SB>of a low refractive index material formed by EB evaporation method, which are alternately laminated on one another. <P>COPYRIGHT: (C)2013,JPO&INPIT |
