LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a liquid processing apparatus which conducts liquid processing and dry processing at different height positions.

SOLUTION: A liquid processing apparatus includes: a substrate holding part holding a substrate; a rotation driving part rotating the substrate holding part; a substrate holding part lifting member moving up and down the substrate holding part; a process liquid supply part supplying a process liquid to the substrate; a liquid receiving cup enclosing the substrate when the process liquid is supplied to the substrate; and a dry cup which is positioned above the substrate and the liquid receiving cup when the process liquid is supplied to the substrate, the dry cup enclosing the substrate and positioned above the liquid receiving cup when the substrate is dried. The above object is achieved by the liquid processing apparatus.

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