| 发明名称 |
MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS |
| 摘要 |
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
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| 申请公布号 |
US2013140944(A1) |
申请公布日期 |
2013.06.06 |
| 申请号 |
US201213681904 |
申请日期 |
2012.11.20 |
| 申请人 |
CHEN DAVID M.;KUYPERS JAN H.;MOHANTY PRITIRAJ;SCHOEPF KLAUS JUERGEN;ZOLFAGHARKHANI GUITI;GOODELLE JASON;REBEL REIMUND;SAND 9, INC. |
发明人 |
CHEN DAVID M.;KUYPERS JAN H.;MOHANTY PRITIRAJ;SCHOEPF KLAUS JUERGEN;ZOLFAGHARKHANI GUITI;GOODELLE JASON;REBEL REIMUND |
| 分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
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