发明名称 |
SINGLE DISC VAPOR LUBRICATION |
摘要 |
Apparatus and method for vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a disk-shaped substrate. The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recording media.
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申请公布号 |
US2013139754(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201313751926 |
申请日期 |
2013.01.28 |
申请人 |
SEAGATE TECHNOLOGY LLC;SEAGATE TECHNOLOGY LLC |
发明人 |
STIRNIMAN MICHAEL JOSEPH;MCLEOD PAUL STEPHEN |
分类号 |
G11B5/85;B05D5/08;B05D7/24;G11B5/84 |
主分类号 |
G11B5/85 |
代理机构 |
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