PIEZOELECTRIC MOTOR, DRIVE UNIT, ELECTRONIC PART TRANSFER APPARATUS, ELECTRONIC PART INSPECTION APPARATUS, ROBOT, AND PRINTER

摘要

A piezoelectric motor includes a piezoelectric element, an oscillating plate including the piezoelectric element, a driving projection provided at an end of the oscillating plate, and a driven member driven by the driving projection coming into abutment therewith and is characterized in that Young's modulus E1 of the driving projection and Young's modulus E2 of the driven member are different.