发明名称 |
MEMS Microphone And Method For Producing The MEMS Microphone |
摘要 |
The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier (TR) such that the transducer element (WE) is enclosed between the cover and the carrier (TR); a first sound inlet opening (SO1) is produced in the carrier (TR); a functional test of the microphone is carried out; the first sound inlet opening (SO1) is closed; and a second sound inlet opening (SO2) is created in the cover. The present invention further relates to a microphone resulting from the method, in which the first sound inlet opening (SO1) is prepared but closed.
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申请公布号 |
US2013140656(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201113805630 |
申请日期 |
2011.07.07 |
申请人 |
PAHL WOLFGANG;KRUEGER HANS;FEIERTAG GREGOR;STELZL ALOIS;LEIDL ANTON;SEITZ STEFAN;EPCOS AG |
发明人 |
PAHL WOLFGANG;KRUEGER HANS;FEIERTAG GREGOR;STELZL ALOIS;LEIDL ANTON;SEITZ STEFAN |
分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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