| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an assembling method for a piezoelectric valve unlikely to cause air-leakage when the valve is closed. <P>SOLUTION: The assembling method is for a piezoelectric valve 10 comprised of a valve body 20 having a gas pressure chamber for receiving compressed gas supplied from the outside, and a gas discharge part formed with a gas discharge path and a valve seat for discharging the compressed gas from the gas pressure chamber, and an actuator 30 having a valve body 31 for opening/closing the gas discharge path, a piezoelectric element 32 for generating drive force as displacement necessary for operation of the valve body, and a pair of displacement increasing mechanisms for increasing the displacement of the piezoelectric element to operate the increased displacement to the valve body, and characteristically includes a step of applying predetermined voltage to the piezoelectric element to operate the valve body in the valve opening direction, a step of bringing the valve body operated in the valve opening direction into contact with a valve seat surface of the valve seat 24, a step of fixing the actuator to the valve body, and a step of releasing the predetermined voltage applied to the piezoelectric element. <P>COPYRIGHT: (C)2013,JPO&INPIT |
