摘要 |
<P>PROBLEM TO BE SOLVED: To realize a small-sized current sensor with a high sensitivity and a high precision that can detect a magnetic field generated due to a current by integration with use of a compound semiconductor circuit. <P>SOLUTION: A semiconductor circuit (LSI circuit) and a compound semiconductor circuit (compound semiconductor element having a hole element) are formed on a substrate, and an electric wiring is further formed immediately on the compound semiconductor element. The wiring is a metal wiring having a horseshoe shape to increase a magnetic flux density to the compound semiconductor circuit. A detected current is applied to the electric wiring. <P>COPYRIGHT: (C)2013,JPO&INPIT |