| 摘要 |
An X-ray inspection apparatus (100) includes an X-ray source (10), an X-ray detector (23), an image acquisition control mechanism (30) for controlling acquisition of image data from the X-ray detector (23), an inspection object drive mechanism (20) for moving an inspection object (1), an X-ray source control mechanism (60), and an operation unit (70). The X-ray source control mechanism (60) causes the X-ray source (10) to output X-rays from focal point positions aligned in the X direction, based on an instruction from the operation unit (70). The inspection object (1) is divided into a plurality of partial areas. The image acquisition control mechanism (30) acquires a partial image which is an image of an X-ray output from each focal point position and transmitted through each partial area. When acquisition of partial images for all the focal point positions is finished, the inspection object drive mechanism (20) moves the inspection object (1) in the Y direction based on an instruction from the operation unit (70). |
