| 摘要 |
PURPOSE: A hybrid plasma reactor is provided to suitably respond to a process in a process chamber, regardless of the property change of various process conditions. CONSTITUTION: A reactor body(11) has a plasma discharge space, a gas inlet, and a gas outlet. A hybrid plasma source(20) has first and second hybrid electrodes which are inductively and capacitively combined with the plasma formed in the plasma discharge space, by providing one or more turn current paths. An AC switching power source(32) supplies plasma generating power to the first and second hybrid electrodes. |
