| 摘要 |
<p>PURPOSE: A support for holding a work piece, an apparatus for installing the work piece, and a method for installing the work piece are provided to hold and support a work piece under vacuum atmosphere. CONSTITUTION: A support for holding a work piece includes a cylindrical main body part(27) and an adhesion part(49). The adhesion part is installed at one opened part of the main body part. At least part of the main body part is composed of an elastic body(51). An apparatus for installing the work piece includes a first table, a second table, a work piece supporting unit, a vacuum atmosphere generating unit, and a control unit. A method for installing the work piece includes work piece installing processes, a vacuum atmosphere generating process, a work piece installing process, a work piece pressurizing process, and a work piece holding support separating process. [Reference numerals] (AA) Upper direction; (BB) Z axial direction; (CC) Lower direction</p> |
