Transport system for holding and transporting flexible substrates

摘要

The foil/film has substrates fixed temporarily on a transport foil/film by flexible cement where the transport foil/film is drivable by a driving unit for transport of the substrates. The transport foil/film is made as an endless belt and formed from a plastic and/or fiber material. The transport foil/film is wound onto a transport roll. The substrates are formed from a material of a group of semiconductors or connecting semiconductors and from one of the materials such as glass, silicon, gallium arsenide, indium phosphide and ceramic. An independent claim is also included for a method for accommodating and transporting a thin, flexible substrate along a transport distance of a transport system.