发明名称 METHOD FOR FORMING FUNCTIONAL PART IN MINUTE SPACE
摘要 PURPOSE: A method for forming a functional part in a minute space is provided to easily form a functional part having no micro void and no gap by using low temperature dissipation based functional material. CONSTITUTION: A minute space(3) is formed in an object(1). A dissipation based functional material(5) is filled in the minute space. The dissipation based functional material is formed by dispersing a low melting point metal micropowder(52) to a liquid dispersion medium(51). A gap(G1) is formed between the fine particles of the low melting point metal micropowder. The gap is filled with the low melting point metal micropowder. [Reference numerals] (a) Preparation of an object; (b) Pouring process of liquid dispersion of low melting metal powder; (c) Evaporation process of dispersion medium; (d) Heating process; (e) Pressing and hardening process
申请公布号 KR20130059281(A) 申请公布日期 2013.06.05
申请号 KR20120133271 申请日期 2012.11.22
申请人 NAPRA CO., LTD. 发明人 SEKINE SHIGENOBU;SEKINE YURINA
分类号 H01L21/28;H01L21/3205;H01L21/48;H01L21/768 主分类号 H01L21/28
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