发明名称 |
GROUNDED CHUCK |
摘要 |
Improved reduction of static charge in spin chucks is achieved by providing one or more pin assemblies which are formed from chemically inert material and which include an electrically conductive inlay. |
申请公布号 |
KR20130059326(A) |
申请公布日期 |
2013.06.05 |
申请号 |
KR20127026604 |
申请日期 |
2011.04.06 |
申请人 |
LAM RESEARCH AG |
发明人 |
BRUGGER MICHAEL;LACH OTTO |
分类号 |
H01L21/687;H01L21/304;H01L21/68;H01L21/683 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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