摘要 |
An optical filter (1) comprises a first substrate (3); a first mirror (4B) provided to the first substrate (3); a first electrode (6B) provided to the first substrate (3); a second substrate (2) disposed so as to be opposed to the first substrate (3); a second mirror (4A) provided to the second substrate (2), and opposed to the first mirror (4B); and a second electrode (6A) provided to the second substrate (2), and opposed to the first electrode (6B), wherein the second substrate (2) has a groove (8) surrounding the second mirror (4A) in a plan view, the groove (8) includes a first curved surface (8b) with a large curvature radius between a first side surface (8c) of the groove and a bottom surface (8a) of the groove, and a second curved surface (8d) with a large curvature radius between a second side surface (8e) of the groove and the bottom surface (8a) of the groove, and the first mirror and the second mirror are composed of a dielectric multilayer film having high-refractive index layers and low-refractive index layers stacked alternately to each other. |