发明名称 |
Wire saw device and method for operating same |
摘要 |
<p>A wire saw device for sawing semiconductor material is provided, the wire saw device comprising a wire guide device (110) adapted to guide a wire for forming at least one wire web (200) for sawing the semiconductor material, and at least one wire management unit (130) for providing a wire to the wire guide device, wherein the wire guide device (110) and the at least one wire management unit (130) are adapted to provide the at least one wire web such that an effective cutting area of 12 m 2 /h or more is provided.</p> |
申请公布号 |
EP2110216(B1) |
申请公布日期 |
2013.06.05 |
申请号 |
EP20080154493 |
申请日期 |
2008.04.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SCHNEEBERGER, STEFAN;NASCH, PHILIPPE;THOMMEN, CEDRIC |
分类号 |
B28D5/00;B23D57/00;B28D5/04 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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