THERMAL CO-EVAPORATOR OF LARGE AREA CIGS THIN FILM AND 3-STAGE PROCESSES

摘要

PURPOSE: An apparatus for manufacturing a CIGS thin film with a 3-stage process is provided to uniformly deposit a CIGS deposition composite on a large-sized glass. CONSTITUTION: A heating part(100) includes a first chamber(110) for accommodating a crucible(120). A heating unit and a heat insulating unit are installed in the first chamber. A spraying part(200) ejects a deposition composite through a nozzle hole formed in the lower part of a spraying unit(220). A surface heater unit(320) heats the internal space of a second housing(210). A transfer part(300) moves a mounting plate(340) with constant speed.