VACUUM PUMP

摘要

A vacuum pump comprises a drive shaft and a Siegbahn pumping mechanism. The Siegbahn pumping mechanism comprises a rotor element located on the drive shaft and an annular stator element located about the drive shaft and proximate the rotor element, the stator element comprising a plurality of walls extending towards the rotor element and defining a plurality of spiral channels. The stator element comprises a plurality of sections, with means such as a resilient member being located about the sections to urge the sections together, and thereby inhibit gas leakage between the sections of the stator element. The resilient member can also form a seal between the stator sections and a casing located about the pumping mechanism.