发明名称 |
Apparatus for patterning electrode of solar cell and method therefor |
摘要 |
PURPOSE: An apparatus for patterning an electrode of a solar cell and a method thereof are provided to reduce process time by forming a metal pattern on a wafer by using an aerosol selection unit. CONSTITUTION: An aerosol selection unit(200) is coated by metal to form electrode patterns on a wafer. A concentration unit(300) selectively concentrates and controls an aerosol particle. The aerosol selection unit functions as a virtual impact portion. The concentration unit functions as an injection nozzle portion(310). A gathering portion(311a) of the concentration unit is formed at a lower portion of an acceleration portion(211a) of the virtual impact portion. |
申请公布号 |
KR101271528(B1) |
申请公布日期 |
2013.06.05 |
申请号 |
KR20110025936 |
申请日期 |
2011.03.23 |
申请人 |
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发明人 |
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分类号 |
H01L31/18;H01L31/0224;H01L31/04;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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