发明名称 Apparatus for patterning electrode of solar cell and method therefor
摘要 PURPOSE: An apparatus for patterning an electrode of a solar cell and a method thereof are provided to reduce process time by forming a metal pattern on a wafer by using an aerosol selection unit. CONSTITUTION: An aerosol selection unit(200) is coated by metal to form electrode patterns on a wafer. A concentration unit(300) selectively concentrates and controls an aerosol particle. The aerosol selection unit functions as a virtual impact portion. The concentration unit functions as an injection nozzle portion(310). A gathering portion(311a) of the concentration unit is formed at a lower portion of an acceleration portion(211a) of the virtual impact portion.
申请公布号 KR101271528(B1) 申请公布日期 2013.06.05
申请号 KR20110025936 申请日期 2011.03.23
申请人 发明人
分类号 H01L31/18;H01L31/0224;H01L31/04;H01L31/042 主分类号 H01L31/18
代理机构 代理人
主权项
地址