METHOD FOR PRODUCING A CAPACITOR INCLUDING AN ARRAY OF NANOCAPACITORS

摘要

The invention relates to a method for producing a capacitor including an array of nanocapacitors, in which the following steps are performed using a mould having a sealed surface, referred to as the lower surface, and a top surface through which a network of pores extend: (a) filling the pores of the mould and covering the top surface of said mould with an electrically conductive material, in order to form a structure consisting of an array of nanoscale objects connected by a single substrate; (b) removing the mould; (c) depositing, on the outline of the structure (204) obtained at the end of step (b), at least one bilayer consisting of a first layer of an electrically insulating material (205) and a second layer of an electrically conductive material (207); and then (d) locally removing said at least one bilayer deposited in step (c) from the substrate (202) in order to form the electrical contact.