| 摘要 |
An optical filter (1) comprising: a first substrate (3); a first mirror (4B) provided to the first substrate (3); a first electrode (6B) provided to the first substrate (3); a second substrate (2) disposed so as to be opposed to the first substrate (3); a second mirror (4A) provided to the second substrate (2), and opposed to the first mirror (4B); and a second electrode (6A) provided to the second substrate (2), and opposed to the first electrode (6B), wherein the second substrate (2) has a groove (8) surrounding the second mirror (4A) in a plan view, the groove (8) includes a curved surface with a large curvature radius between a side surface of the groove and a bottom surface of the groove, a gap between the first mirror (4B) and the second mirror (4A) is smaller than a gap between the first electrode (6B) and the second electrode (6A). |
