发明名称 EXPOSURE APPARATUS
摘要 <p>PURPOSE: A vertical light lenticular exposure apparatus is provided to decrease a failure rate by using the light-collecting function of a lenticular. CONSTITUTION: A light source device(2) includes a light source(4) and a lenticular(5). The light source emits light. The lenticular is placed in the lower part of the light source. The lenticular is formed in the central part of the lenticular lens.</p>
申请公布号 KR20130058121(A) 申请公布日期 2013.06.04
申请号 KR20110123966 申请日期 2011.11.25
申请人 SEONG, NAK HOON 发明人 SEONG, NAK HOON
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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