LIGHT IRRADIATION APPARATUS

摘要

PURPOSE: A device for irradiating light is provided to efficiently prevent air from flowing between an object board and an excimer lamp by discharging the air flowing along one surface in which the light is irradiated on the object board and to irradiate the light with high efficiency. CONSTITUTION: A device for irradiating light comprises a lamp house(10) and a gas supply member(30). An excimer lamp(20) irradiating the light to one surface of an object board returned along a board returning path(L) in a lamp house is built in. Pressure buffer spaces(S1,S2) are formed to be adjacent in the lamp house. An air discharging member(40) is installed to an upper side of the pressure buffer space. The air discharging member discharges air flowing along one surface in which the light is irradiated.