发明名称 APPARATUS AND METHOD FOR MANUFACTURING SINGLE CRYSTAL
摘要 The present invention provides a single-crystal manufacturing apparatus comprising a chamber that accommodates a crucible containing a raw material melt; a pulling mechanism for pulling a single crystal; a heater for heating the raw material melt, the heater being movable upwardly and downwardly; and a temperature measurement means for measuring temperature of the heater, wherein the temperature measurement means is movable upwardly and downwardly in response to the upward and downward movement of the heater. The present invention provides a single-crystal manufacturing apparatus and a method for manufacturing a single crystal that can stably measure the heater temperature regardless of a change in operation conditions and hence stably control the heater temperature and the heater output, resulting in a stable operation.
申请公布号 KR20130058686(A) 申请公布日期 2013.06.04
申请号 KR20127029615 申请日期 2011.04.06
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 KITAGAWA KATSUYUKI;IWASAKI ATSUSHI;OHTSUNA HIROSHI
分类号 C30B15/20 主分类号 C30B15/20
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