发明名称 Optical element supporting device, exposure apparatus using same, and device manufacturing method
摘要 The optical element supporting device of the present invention includes a first supporting member that supports the optical element, a second supporting member that supports the first supporting member at a plurality of locations, a plate spring fastened to the first supporting member and having a plate thickness extending in the optical axis direction of the optical element, and a force supplying unit, which is provided on the first supporting member, configured to provide a force in the optical axis direction applied to the plate spring at a location different from the plurality of locations, wherein the force supplying unit elastically deforms the first supporting member by receiving the reactive force generated by the force applied to the plate spring to thereby adjust the position of the optical element.
申请公布号 US8456614(B2) 申请公布日期 2013.06.04
申请号 US20090608796 申请日期 2009.10.29
申请人 TOMITA HIROYUKI;CANON KABUSHIKI KAISHA 发明人 TOMITA HIROYUKI
分类号 G02B7/02;G03B27/42;G03B27/52;G03B27/54 主分类号 G02B7/02
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