发明名称 |
Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target |
摘要 |
The invention provides a polycrystal magnesium oxide (MgO) sintered body which is capable of having a sintered density close to a theoretical density thereof. The MgO sintered body exhibits excellent mechanical properties and heat conductivity, while reducing contamination of an atmosphere due to gas generation. The invention also provides a production method for the sintered body. The polycrystal MgO sintered body has a unique crystalline anisotropy in which (111) faces are oriented along a surface applied with a uniaxial pressure at a high rate. The polycrystalline MgO sintered body is obtained by a method which includes the steps of: sintering an MgO raw material powder, having a particle size of 1 mum or less, under a uniaxial pressure and then subjecting the sintered powder to a heat treatment under an atmosphere containing 0.05 volume % or more of oxygen, at a temperature of 1273 K or more for 1 minute or more.
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申请公布号 |
US8454933(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US20090811541 |
申请日期 |
2009.01.27 |
申请人 |
NAGANO MITSUYOSHI;TAKASU MASANOBU;ARITA YO;SANO SATORU;NIPPON TUNGSTEN CO., LTD.;UBE MATERIAL INDUSTRIES, LTD. |
发明人 |
NAGANO MITSUYOSHI;TAKASU MASANOBU;ARITA YO;SANO SATORU |
分类号 |
C01B13/14;B22F3/15;B28B1/00;B28B3/00;B28B5/00;C01F5/02;C01F5/14;C01F11/02;C04B33/32;C04B33/36;C04B35/64;C22C1/04;C23C14/00;C25B11/00;C25B13/00 |
主分类号 |
C01B13/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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