发明名称 Method for producing a copolymer for photoresist
摘要 The present invention provides a method for production of a copolymer for photoresists in which the bias of the monomer composition ration is small. This method for production is a method for production of a copolymer for photoresists, which copolymer containing at least two types of repeating units, the method having a supplying step of supplying a monomer solution and a solution containing a polymerization initiator into a polymerization reaction system, wherein the range of fluctuation of the monomer composition ratio of unreacted monomers is within the range between minus 15% and plus 15% or the standard deviation of the monomer composition ratio of unreacted monomers is within 2 in the polymerization reaction system during the period from the start of the polymerization reaction to the end of supplying of the monomer solution.
申请公布号 US8455596(B2) 申请公布日期 2013.06.04
申请号 US20100702356 申请日期 2010.02.09
申请人 OIKAWA TOMO;IKAWA EIICHI;MARUZEN PETROCHEMICAL CO., LTD. 发明人 OIKAWA TOMO;IKAWA EIICHI
分类号 C08F2/00 主分类号 C08F2/00
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