METHOD FOR MANUFACTURING GLASS TYPE PROBE FOR TESTING FLAT PANELDISPLAY

摘要

PURPOSE: A method for manufacturing a glass-type probe for testing a flat panel display is provided to satisfy mechanical and electrical characteristics, which are needed for efficiently transmitting electrical signals, necessary for repetitive lighting test of a flat panel display and to accurately and continuously fix the coordinates during repetition, thereby improving reliability of a lighting test system. CONSTITUTION: A method for manufacturing a glass-type probe for testing a flat panel display comprises the steps of: depositing a seed layer(101) on a glass film for electroplating; coating the seed layer with a first photoresist for electroplating frame; forming a pattern of a probe beam(103) on the first photoresist for electroplating frame using a photo mask by photolithography; forming a probe beam by electroplating using the pattern of a probe beam as an electroplating frame; forming a probe tip electroplating frame by coating the probe beam with a second photoresist for electroplating frame; forming a probe tip(105) by electroplating using the second electroplating frame; removing the photoresists of the first and second electroplating frames; removing the seed layer for electroplating except the portion of the seed layer under the probe beam by utilizing the probe beam as a mask; coating the probe tip on the probe beam with a third photoresist(106) for protection of the probe beam and separation of electrical signals, which has excellent electrical characteristics; forming a pattern on the third photoresist using a photoresist process of semiconductor processing; and separating the formed probe structure from the base layer.