发明名称 LIFT PIN ASSEMBLY AND APPARATUS HAVING THE SAME
摘要 PURPOSE: A lift pin assembly and an apparatus having the same are provided to prevent a lift pin from being loosen from a base, using a fixing pin inserted into the side of the base. CONSTITUTION: The side of a base(131) includes a fixing pin insertion hole. A lift pin(132) is inserted into the lift pin inserting hole. The lift pin is fixed to the base. A fixing pin(133) is inserted into the fixing pin insertion hole. The fixing pin is combined with the lift pin.
申请公布号 KR20130058411(A) 申请公布日期 2013.06.04
申请号 KR20110124403 申请日期 2011.11.25
申请人 TES CO., LTD. 发明人 YANG, SEONG CHOL;KANG, DONG YOUNG
分类号 H01L21/683;H01L21/68 主分类号 H01L21/683
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