发明名称 |
LIFT PIN ASSEMBLY AND APPARATUS HAVING THE SAME |
摘要 |
PURPOSE: A lift pin assembly and an apparatus having the same are provided to prevent a lift pin from being loosen from a base, using a fixing pin inserted into the side of the base. CONSTITUTION: The side of a base(131) includes a fixing pin insertion hole. A lift pin(132) is inserted into the lift pin inserting hole. The lift pin is fixed to the base. A fixing pin(133) is inserted into the fixing pin insertion hole. The fixing pin is combined with the lift pin.
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申请公布号 |
KR20130058411(A) |
申请公布日期 |
2013.06.04 |
申请号 |
KR20110124403 |
申请日期 |
2011.11.25 |
申请人 |
TES CO., LTD. |
发明人 |
YANG, SEONG CHOL;KANG, DONG YOUNG |
分类号 |
H01L21/683;H01L21/68 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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