发明名称 |
Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed |
摘要 |
A method and apparatus for analysing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating beam and a sample to be observed, by characterising the distribution of the state of polarization of light across a measurement plane, the method comprising the steps of generating a beam of illuminating light; controlling the state of polarization at different positions across the beam width of the light beam; focussing said illuminating light beam to a focus, wherein said focus is a tight focus and said focused light has a suitable three-dimensional vectorial structure at the focus; detecting and measuring the state of polarization of the reflected light at different positions across the width of the measurement plane to retrieve information on the three-dimensional vectorial electromagnetic interaction of the illuminated focused field and the sample.
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申请公布号 |
US8456632(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US20080598583 |
申请日期 |
2008.04.28 |
申请人 |
DAINTY JOHN CHRISTOPHER;RODRIGUEZ OSCAR GABRIEL;SAUCEDO DAVID LARA |
发明人 |
DAINTY JOHN CHRISTOPHER;RODRIGUEZ OSCAR GABRIEL;SAUCEDO DAVID LARA |
分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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