发明名称 Semiconductor processing
摘要 Devices, methods, and systems for semiconductor processing are described herein. A number of method embodiments of semiconductor processing can include forming a silicon layer on a structure, forming an opening through the silicon layer and into the structure, and selectively forming a resistance variable material in the opening such that the resistance variable material does not form on the silicon layer.
申请公布号 US8455296(B2) 申请公布日期 2013.06.04
申请号 US201113190879 申请日期 2011.07.26
申请人 MARSH EUGENE P.;QUICK TIMOTHY A.;MICRON TECHNOLOGY, INC. 发明人 MARSH EUGENE P.;QUICK TIMOTHY A.
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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