| 摘要 |
A apparatus for drying a large area substrate is provided to achieve uniform dry on the large area substrate due to temperature non-uniformity of the large area substrate by increasing a temperature of dry air and injecting the dry air having an increased temperature onto areas of which temperatures are relatively less than them of any other areas of the substrate. A apparatus for drying a large area substrate includes: a temperature distribution detecting part(30), a temperature control part(60), an air knife(50), and a heater part. The temperature distribution detecting part detects a temperature distribution of a substrate(10). The temperature control part controls a temperature according to a temperature distribution of the substrate detected by the temperature distribution detecting part. The air knife injects dry air onto the substrate. The heater part increases in part the temperature of the dry air injected from the air knife under the control of the temperature control part. |
