SUBSTRATE PROCESSING SYSTEM, AND TRANSFER MODULE THEREFOR

摘要

PURPOSE: A substrate processing system and a transfer module therefor are provided to overcome the restriction of installation by forming an extension space for a process module in a transfer chamber. CONSTITUTION: A process module has a process space for treating a substrate. A transfer module(200) includes a transfer chamber(210). The transfer chamber corresponds to a part of the process module. The transfer chamber includes a process space extension part(400). The process space extension part extends the process space.