发明名称 |
CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM |
摘要 |
The present invention provides a novel carbon-based material in which carbons different in property are combined in such a manner as to be applicable to a device. The carbon-based thin film provides a carbon-based thin film 10 including first phases 1 that contain amorphous carbon and extend in a film thickness direction, and a second phase 2 that contains a graphite structure and intervenes between the first phases 1. In the thin film, at least one selected from the group consisting of the following a) to e) is satisfied: a) the second phase contains more graphite structures per unit volume than the first phases; b) a density of the second phase is larger than that of the first phases; c) an electric resistivity of the second phase is lower than that of the first phases; d) an elastic modulus of the second phase is higher than that of the first phases; and e) in the second phase, a basal plane of the graphite structure is oriented along the film thickness direction. |
申请公布号 |
CA2556782(C) |
申请公布日期 |
2013.06.04 |
申请号 |
CA20052556782 |
申请日期 |
2005.02.25 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
IWAMURA, EIJI |
分类号 |
C23C14/00;B82B1/00;C01B31/02;C23C14/06;C23C14/58 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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