发明名称 APPARATUS FOR MODIFYING PHYSICAL PROPERTIES OF CONDUCTING POLYMER NANOMATERIAL USING FOCUSED ELECTRON-BEAM IRRADIATION, METHOD THEREFOR AND SERIAL JUNCTIONED NANOWIRE MODIFYED BY THE SAME METHOD
摘要 PURPOSE: An apparatus for reforming the physical properties of a conductive polymer nanostructure, and a method for the same, and a serial junction nanowire reformed by the method are provided to reform the structural characteristic, the doped state, and the electric characteristic of the nanostructure by precisely controlling electron beam. CONSTITUTION: An apparatus for reforming the physical properties of a conductive polymer nanostructure includes a conductive polymer nanostructure(180), a focused electron beam emitting part(100), and a focused electron beam controlling part(190). The focused electron beam emitting part emits nanoscaled-electron beam in order to generate a focus on the conductive polymer nanostructure. The focused electron beam controlling part controls the emitted position of the nanoscaled-electron beam. The conductive polymer nanostructure is a nanowire. The focused electron beam emitting part is one of a scanning electron microscope, a transmission electron microscope, and an electron beam lithography device. [Reference numerals] (190) Focused electron beam controlling part; (AA) Electron beam source; (BB) First light collecting lens; (CC) Aperture; (DD) Stigmator/deflection coil; (EE) Second light collecting lens
申请公布号 KR101268443(B1) 申请公布日期 2013.06.04
申请号 KR20110038421 申请日期 2011.04.25
申请人 发明人
分类号 B01J19/12;B82B3/00;C08J7/18;H01J37/06 主分类号 B01J19/12
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