METHOD FOR FABRICATING THERMOELECTRICITY NANOWIRE HAVING CORE/SHELL STRUCTURE

摘要

PURPOSE: A manufacturing method of a thermoelectric nanowire is provided to easily manufacture the thermoelectric nanowire having a core/shell structure of a Bi/thermoelectric material through manufacturing a single nanowire and sputtering of a thermoelectric material. CONSTITUTION: A manufacturing method of a thermoelectric nanowire having a core/shell structure comprises the following steps: a substrate(10) with an oxide layer(30) on one side is prepared, and a Bi thin film(50) is formed on the oxide layer; a structure produced in the Bi thin film forming step is heat-treated to induce a compressive stress by the difference of the thermal expansion coefficient among the substrate, the oxide layer and the Bi thin film, and to grow a Bi monocrystal nanowire on the upper surface of the Bi thin film; and the substrate of the structure in which the nanowire is grown is cooled at a low temperature, and a thermoelectric material(70) is sputtered on the Bi monocrystal nanowire in a low cooling system to manufacture the thermoelectric nanowire of a Bi/thermoelectric material with the core/shell structure. [Reference numerals] (AA) Liquefied nitrogen