发明名称 METHOD FOR THE PRODUCTION OF WATER-REACTIVE AL FILM AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER
摘要 <p>AbstractTitle of the Invention: Method for the Production of Water-Reactive Al Film and Constituent Member for Film-Forming ChamberHerein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NA1 or 5NA1 as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.Fig. 1</p>
申请公布号 SG189755(A1) 申请公布日期 2013.05.31
申请号 SG20130025556 申请日期 2009.04.27
申请人 ULVAC, INC. 发明人 KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO
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