A PRESSURE SENSOR BASED ON MICRO-MECHANICAL RESONATOR USING HEAT-EFFECT AND PRESSURE MEASURING METHOD THEREOF

摘要

PURPOSE: A pressure sensor based on a micro-oscillator device using a thermal effect and a pressure measuring method using the same are provided to obtain a subminiature pressure sensor of a micrometer size. CONSTITUTION: A pressure sensor based on a micro-oscillator device using a thermal effect comprises an oscillator of a cantilever beam structure and a piezoelectric element. The oscillator of the cantilever beam structure is composed of a silicon substrate(11), silicon nitride layers(12), and an aluminum layer(130). The silicon nitride layers are deposited on the both surface of the silicon substrate. The aluminum layer is deposited on a doubly-clamped beam isolated by an etching process from a photo-lithography in the silicon nitride layer. The piezoelectric element oscillates the oscillator by electric signals.