SUPPORT RING ASSEMBLY,申请号KR20050104893-传众专利搜索

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发明名称	SUPPORT RING ASSEMBLY
摘要	<p>주변 에지를 갖는 기판 지지부를 위한 기판 링 조립체가 제공된다. 상기 조립체는 상기 기판 지지부의 상기 주변 에지를 에워싸며 적어도 부분적으로 덮고 있는 내측 둘레를 갖는 환형 밴드를 갖는다. 상기 조립체는 또한 상기 환형 밴드를 상기 기판 지지부의 상기 주변 에지에 고정시키는 클램프를 갖는다.</p>
申请公布号	KR101267466(B1)	申请公布日期	2013.05.31
申请号	KR20050104893	申请日期	2005.11.03
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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