发明名称 SOLDER BALL PRINTER
摘要 <P>PROBLEM TO BE SOLVED: To precisely print a print solder ball in the cause of a recent trend of miniaturization of a solder bump formed at an electrode part of a semiconductor chip, with a solder ball also being miniaturized when printing is performed using the solder ball. <P>SOLUTION: A filling head for solder ball printing secures a squeegee holder at each surface of an octagonal fixing member provided to a rotating shaft. The squeegee holder is attached with a slit squeegee made from a plurality of line materials. By moving the filling head while rotating the rotational shaft and while being pressed against a mask surface under a predetermined pressing force, the solder ball is efficiently filled in a mask opening part. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013105889(A) 申请公布日期 2013.05.30
申请号 JP20110248737 申请日期 2011.11.14
申请人 HITACHI PLANT TECHNOLOGIES LTD 发明人 IGARASHI AKIO;MIZUTORI RYOSUKE;KAWABE SHINICHIRO;HASHIMOTO NAOAKI;HONMA MAKOTO
分类号 H01L21/60 主分类号 H01L21/60
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