发明名称 SEMICONDUCTOR DEVICE HAVING SHIELDED CONDUCTIVE VIAS AND METHOD FOR MANUFACTURING THE SAME
摘要 The present invention relates to a semiconductor device having a shielding layer and a method for making the same. The semiconductor device includes a substrate, an inner metal layer, a shielding layer, an insulation material, a metal layer, a passivation layer and a redistribution layer. The inner metal layer is disposed in a through hole of the substrate. The shielding layer surrounds the inner annular metal. The insulation material is disposed between the inner metal layer and the shielding layer. The metal layer is disposed on a surface of the substrate, contacts the shielding layer and does not contact the inner metal layer. The redistribution layer is disposed in an opening of the passivation layer so as to contact the inner metal layer.
申请公布号 US2013134601(A1) 申请公布日期 2013.05.30
申请号 US201113306762 申请日期 2011.11.29
申请人 CHENG HUNG-HSIANG;LIN TZU-CHIH;HUNG CHANG-YING;WU CHIH-WEI;ADVANCED SEMICONDUCTOR ENGINEERING, INC. 发明人 CHENG HUNG-HSIANG;LIN TZU-CHIH;HUNG CHANG-YING;WU CHIH-WEI
分类号 H01L23/48;H01L21/768 主分类号 H01L23/48
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