| 摘要 |
<p>The invention relates to two methods for preparing AlNiCo-based magnetic materials as thin layers or films with applications in the micro-electromechanical systems, such as magnetic field sensors, actuation sensors, actuation devices or the like. According to the invention, the first method for deposition by pulsed laser ablation consists in obtaining by the classic method an AlNiCo round target piece of a preset composition, having a diameter of 20...50 mm, which is subjected to the process of removing clusters of material by pulsed laser ablation, the sample being subjected to a thermal treatment in three successive stages, at temperatures of 600°C, 800°C and 800°C, for 1 h. The second method for deposition by pulverization, as claimed by the invention, consists in obtaining a round target piece made of AlNiCo powders having a diameter ranging between 20...50 mm, observing the final composition and having a granulometric dispersion according to a gaussian distribution, the piece being then subjected to evaporation and vapour pulverization, while, in order to obtain a crystalline structure of the deposited thin films, they are subjected to a thermal treatment under vacuum, at a temperature of 600°C, for 1 h.</p> |
