| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavefront sensor capable of improving a processing speed and reducing a cost. <P>SOLUTION: The wavefront sensor performs a control to scan and read a plurality of preset partial image areas 12 in at least one scanning direction of a horizontal scan and a perpendicular scan of a two-dimensional detector 10 and not to scan an image area other than the plurality of partial image areas 12. The plurality of partial image areas 12 have predetermined widths parallel to the scanning direction and disposed at substantially equal intervals. An alignment interval of lenslets constituting a lenslet array is configured to be equal to the interval of the partial image areas 12 of the two-dimensional detector 10, and multiple converging-point patterns formed by the lenslets are detected at the partial image areas 12 of the two-dimensional detector 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
