NITRIDE SEMICONDUCTOR SUBSTRATE

摘要

A nitride semiconductor device includes a main surface and an indicator portion. The main surface is a plane inclined by at least 71° and at most 79° in a [1-100] direction from a (0001) plane or a plane inclined by at least 71° and at most 79° in a [-1100] direction from a (000-1) plane. The indicator portion indicates a (-1017) plane, a (10-1-7) plane, or a plane inclined by at least -4° and at most 4° in the [1-100] direction from these planes and inclined by at least -0.5° and at most 0.5° in a direction orthogonal to the [1-100] direction.