发明名称 VACUUM DRYING APPARATUS
摘要 Disclosed is a vacuum drying apparatus. The vacuum drying apparatus according to the present invention dries an object using a pressure difference and heat, thus enabling the solvent mixed with a coating liquid coated on the object to be excellently dried. When a large amount of solvent is dried, a coating liquid may be hardened to the core thereof, and therefore, problems of the coating liquid leaning to one side or of generating pores caused by the solvent remaining at the coating liquid may be reduced. Consequently, reliability of the dried object can be improved. In addition, a connector is arranged in a housing to transmit power from an external source to a heater installed within the housing, and the space between the connector and the housing is completely sealed to achieve further excellent efficiency in drying the solvent mixed with the coating liquid coated on the object.
申请公布号 WO2013042959(A3) 申请公布日期 2013.05.30
申请号 WO2012KR07545 申请日期 2012.09.20
申请人 TERASEMICON CORPORATION 发明人 JEON, YOUNG JUN;LEE, MIN CHUL
分类号 H01L21/302;F26B5/04 主分类号 H01L21/302
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