| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a purification cylinder for exhaust gas including powdered substances discharged in a semiconductor manufacturing process etc., which removes hazardous components from the exhaust gas to purify the exhaust gas, traps the powdered substances within the purification cylinder and prevents a problem of pressure loss for a short time. <P>SOLUTION: The purification cylinder for exhaust gas including the powdered substances includes an exhaust gas introduction port, a purifying agent filling part, a powdered substance trapping tool and a discharge port for purified gas. The powdered substance trapping tool includes: a disk having an outer peripheral edge coming into close contact with an inner wall face of the purification cylinder and including a hole; and an air permeable recessed container stored so that an upper end thereof is brought into close contact with an edge portion of the hole of the disk. A powdered substance trapping material is installed on the surface of the recessed container on the upstream side of a gas flow passage. <P>COPYRIGHT: (C)2013,JPO&INPIT |
