发明名称 BAND SAW CUTTING DEVICE AND INGOT CUTTING METHOD
摘要 <p>The invention is a band saw cutting device that cuts an ingot by guiding a circularly driven blade using static pressure pads while propelling the blade downward relative to the ingot from above same. The band saw cutting device is characterized: in comprising a driving unit that moves the static pressure pads in the front-back direction with respect to the blade circling direction, and a control unit that controls the movement distance and movement speed of the static pressure pads by the driving unit; and in the device controlling the movement of the static pressure pads with the control unit while cutting the ingot. Provided thereby are a band saw cutting device and ingot cutting method which are able to stably limit blade displacement during cutting, stably maintain the quality of the cut surface of an ingot block or a crystal quality evaluation sample wafer cut therewith, prolong blade life, and improve cutting speed.</p>
申请公布号 WO2013076905(A1) 申请公布日期 2013.05.30
申请号 WO2012JP06576 申请日期 2012.10.15
申请人 SHIN-ETSU HANDOTAI CO.,LTD. 发明人 NAKAGAWA, KAZUYA
分类号 B28D5/04;B24B27/06;H01L21/304 主分类号 B28D5/04
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