发明名称 |
SURFACE POLYMER COATINGS |
摘要 |
A plasma chamber (11') for coating a substrate with a polymer layer, the plasma chamber comprises a first electrode set (14') and a second electrode set (14'), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets comprise plural electrode layers (141', 142') and wherein each electrode set comprises plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate. |
申请公布号 |
WO2013034920(A3) |
申请公布日期 |
2013.05.30 |
申请号 |
WO2012GB52201 |
申请日期 |
2012.09.07 |
申请人 |
EUROPLASMA NV;LEGEIN, FILIP;FERDINANDI, FRANK |
发明人 |
LEGEIN, FILIP;FERDINANDI, FRANK |
分类号 |
B01D69/12;C23C14/06;H01J37/32 |
主分类号 |
B01D69/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|