VARIABLE ION GUIDE AND ELECTRON CYCLOTRON RESONANCE ION SOURCE APPARATUS INCLUDING SAME

摘要

The variable ion guide can include: a variable chamber having the length thereof adjusted in one direction; one or more guide electrodes connected to the variable chamber and having the position thereof determined through the adjustment of the length of the variable chamber; and an extraction electrode connected to one end of the variable chamber. With the variable ion guide, an electron cyclotron resonance (ECR) ion source can be configured by including the variable ion guide, a plasma chamber, a magnet unit, and a microwave generating unit. According to the variable ion guide and the ECR ion source apparatus, beams having excellent quality and beams of high current can be variously extracted for ion extraction by properly adjusting the electrode shapes and the sizes and positions of the holes formed in the electrodes.