发明名称 |
GAS FEED INSERT IN A PLASMA PROCESSING CHAMBER AND METHODS THEREFOR |
摘要 |
A gas feed insert configured to be disposed in a passage through an electrode assembly comprising a first insert end having therein a first bore aligned parallel with a linear axis of the gas feed insert. The gas feed insert further includes a second insert end opposite the first insert end, the second insert end having therein a second bore aligned parallel with the linear axis of the gas feed insert and a bore-to-bore communication channel in gas flow communication with the first bore and the second bore. The bore-to-bore communication channel is formed in an outer surface of the gas feed insert so as to prevent a line-of-sight when a gas flows from the first insert end through the bore-to-bore communication to the second insert end.
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申请公布号 |
US2013134138(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
US201213616571 |
申请日期 |
2012.09.14 |
申请人 |
DE LA LLERA ANTHONY;KELLOGG MICHAEL C.;MARAKHTANOV ALEXEI;DHINDSA RAJINDER |
发明人 |
DE LA LLERA ANTHONY;KELLOGG MICHAEL C.;MARAKHTANOV ALEXEI;DHINDSA RAJINDER |
分类号 |
B23K10/00;B23K31/00 |
主分类号 |
B23K10/00 |
代理机构 |
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地址 |
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